A. Hess, J. Dunning, D. Tyler, and C.A. Zorman, “Development of a Microfabricated Flat Interface Nerve Electrode Based on Liquid Crystal Polymer and Polynorbornene Multilayered Structures”, Proceedings of the 3rd International IEEE EMBS Conference on Neural Engineering, Kohala Coast, Hawaii, May 2 – 5, 2007, pp. 32-35.
M. Scardelletti, N. Varaljay, D. Oldham, and C.A. Zorman, “Silicon Carbide as a Chemically-resistant Thin Film Packaging Technology for Microfabricated Antennas”, in Proceedings of the 2006 IEEE Wireless and Microwave Technology Conference, Clearwater FL, December 4-5, 2006, paper number FC-5.
R. Smith, C.A. Zorman, A.J. Fleischman, and S. Roy, “Evaluation of Fluid Flow Through Micromachined Nanoporous Membranes Using a Custom-Built Automated Testing and Data Acquisition System”, Technical Digest – 6th IEEE Conference on Nanotechnology, Cincinnati OH, July 16-21, 2006, pp. 806-809.
W.C. Chang, M. Mehregany, and C.A. Zorman, “Energy Dissipation in Folded-Beam MEMS Resonators Made from Single Crystal and Polycrystalline 3C-SiC Films”, Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems” Bangkok Thailand, January 16 – 19, 2006, pp. 740-744.
C.H. Wu, C.A. Zorman, and M. Mehregany, “Fabrication and Testing of Bulk Micromachined Silicon Carbide Piezoresistive Pressure Sensors for High Temperature Applications”, IEEE Sensors Journal, vol. 6, pp. 316-324, (2006).
X.M.H. Huang, S.C. Jun, C.A. Zorman, M. Mehregany, and J. Hone, “Evaluation of 3C-SiC nanomechanical resonators usng room temperature magnetomotive transduction”, Proceedings of the 4th IEEE Conference on Sensors, Anaheim CA, October 31 to November 3, 2005, pp. 1042-1045.
J. Du, W.H. Ko, M. Mehregany, and C.A. Zorman, “Poly-SiC capacitive pressure sensors made by wafer bonding”, Proceedings of the 4th IEEE Conference on Sensors, Anaheim CA, October 31 to November 3, 2005, pp. 1268-1270.
J.T. Trevino, X.A. Fu, M. Mehregany, and C.A. Zorman, “Low-stress, heavily-doped polycrystalline SiC thin films for MEMS Applications”, in the Proceedings of the 18th IEEE International Conference on Microelectromechanical Systems, Miami FL, January 30 - February 3, 2005, pp. 451-454.
K. Jackson, J. Dunning, C. Zorman, M. Mehregany, and W. Sharpe Jr., “Mechanical Properties of Epitaxial 3C Silicon Carbide Thin Films," Journal of Microelectromechanical Systems, vol. 14, pp. 664-672, (2005).
S. Lei, C.A. Zorman, and S. Garverick, “An Oversampled Capacitance-to-Voltage Converter IC and Time-domain Characterization of a SiC MEMS Resonator” IEEE Sensors Journal, vol. 5, pp. 1353-1361, (2005).
X. Fu, J.L. Dunning, C.A. Zorman, and M. Mehregany, “Measurement of Residual Stress and Elastic Modulus of Polycrystalline 3C-SiC Films Deposited by LPCVD”, Thin Solid Films, vol. 492, pp. 195-202, (2005).
X. Fu, J.L. Dunning, C.A. Zorman, M. Mehregany, “Polycrystalline 3C-SiC thin films grown by dual precursor LPCVD for MEMS applications” Sensors and Actuators A, pp. 169-176, (2005).
D.J. Young, J. Du, C.A. Zorman, and W.H. Ko, “High Temperature Single Crystal 3C-SiC Capacitive Pressure Sensor”, IEEE Sensors Journal, vol. 4, pp. 464-470, (2004).
J. Du, D.J. Young, C. Zorman, and W.H. Ko, “Single Crystal SiC Capacitive Pressure Sensor at 400°C”, in the Technical Digest - 2003 International Electron Devices Meeting - IEDM 2003, Washington DC, December 7-10, 2003, pp. 32.6.1 to 32.6.4.
S. Lei, S. Garverick, S. Stefanescu, and C.A. Zorman, “Oversampled Capacitance-to-Voltage Converter IC with Application to SiC MEMS Resonator”, in the Proceedings of the 2nd IEEE International Conference on Sensors, Toronto Canada, October 22-24, 2003, pp. 882-887.
R.F. Wiser, C.A. Zorman, and M. Mehregany, “Fabrication and Testing of Vertically-actuated Polycrystalline SiC Micromechanical Resonators for MHz Frequency Applications”, in Technical Digest – 12th International Conference on Solid State Sensors, Actuators and Microsystems, Boston, MA, June 8-12, 2003, pp. 1164-1167.
H.-I. Kuo, C.A. Zorman, and M. Mehregany, “Fabrication and Testing of Single Crystalline 3C-SiC Devices Using a Novel SiC-on-Insulator Substrate”, in Technical Digest – 12th International Conference on Solid State Sensors, Actuators and Microsystems, Boston, MA, June 8-12, 2003, pp. 742-745.
X.M.H. Huang, C.A. Zorman, M. Mehregany, and M.L. Roukes, “Quality Factor Issues in Silicon Carbide Nanomechanical Resonators”, in Technical Digest – 12th International Conference on Solid State Sensors, Actuators and Microsystems, Boston, MA, June 8-12, 2003, pp.722-725.
B.S. Richards, A. Lambertz, R.P. Corkish, C.A. Zorman, M. Mehregany, M. Ionescu, and M.A. Green, “3C-SiC as a Future Photovoltaic Material”, in Proceedings of the 3rd World Conference on Photovoltaic Energy Conversion, Osaka Japan, May 12-16, 2003, pp. 2738-2741.
C.A. Zorman and M. Mehregany, “Silicon Carbide for MEMS and NEMS - An Overview”, Invited Paper, in the Proceedings of the IEEE Sensors 2002 Conference, Kissimmee FL, June 12-14, 2002, Paper Number 6.2, pp. 1109-1114.
S. Roy, R.G. DeAnna, C.A. Zorman, and M. Mehregany, “Fabrication and Characterization of Polycrystalline SiC Resonators”, IEEE Transactions on Electron Devices, vol. 49, pp. 2323-2332, (2002).
